5/21/2012	12:12:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/21/2012	12:12:02 PM	Recipe started at 12:12 PM
5/21/2012	12:12:02 PM	Helium valve closed
5/21/2012	12:12:02 PM	H2 valve closed
5/21/2012	12:12:02 PM	BCl3 valve closed
5/21/2012	12:12:02 PM	PH3 valve closed
5/21/2012	12:12:02 PM	SiCl4 pre valve closed
5/21/2012	12:12:02 PM	SiCl4 post valve closed
5/21/2012	12:12:02 PM	Main Vac valve closed
5/21/2012	12:12:02 PM	Bypass valve closed
5/21/2012	12:12:02 PM	Bubbler valve closed
5/21/2012	12:12:02 PM	Helium MFC set to  0.000000
5/21/2012	12:12:02 PM	H2 MFC set to  0.000000
5/21/2012	12:12:02 PM	BCl3 MFC set to  0.000000
5/21/2012	12:12:02 PM	PH3 MFC set to  0.000000
5/21/2012	12:12:02 PM	SiCl4 MFC set to  0.000000
5/21/2012	12:12:02 PM	Bypass solenoid MFC set to  0.000000
5/21/2012	12:12:02 PM	Tube furnace set to 0
5/21/2012	12:12:05 PM	H2 valve closed
5/21/2012	12:12:05 PM	BCl3 valve closed
5/21/2012	12:12:05 PM	PH3 valve closed
5/21/2012	12:12:05 PM	SiCl4 pre valve closed
5/21/2012	12:12:05 PM	SiCl4 post valve closed
5/21/2012	12:12:05 PM	Main Vac valve closed
5/21/2012	12:12:05 PM	Bypass valve closed
5/21/2012	12:12:05 PM	Bubbler valve closed
5/21/2012	12:12:05 PM	Helium valve opened
5/21/2012	12:12:05 PM	Helium MFC set to  500.000000
5/21/2012	12:12:06 PM	H2 MFC set to  0.000000
5/21/2012	12:12:06 PM	BCl3 MFC set to  0.000000
5/21/2012	12:12:06 PM	PH3 MFC set to  0.000000
5/21/2012	12:12:06 PM	SiCl4 MFC set to  0.000000
5/21/2012	12:12:06 PM	Bypass solenoid MFC set to  0.000000
5/21/2012	12:12:06 PM	Tube furnace set to 0
5/21/2012	12:13:18 PM	Helium valve closed
5/21/2012	12:13:18 PM	H2 valve closed
5/21/2012	12:13:18 PM	BCl3 valve closed
5/21/2012	12:13:18 PM	PH3 valve closed
5/21/2012	12:13:18 PM	SiCl4 pre valve closed
5/21/2012	12:13:18 PM	SiCl4 post valve closed
5/21/2012	12:13:18 PM	Main Vac valve closed
5/21/2012	12:13:18 PM	Bypass valve closed
5/21/2012	12:13:18 PM	Bubbler valve closed
5/21/2012	12:13:18 PM	Helium MFC set to  0.000000
5/21/2012	12:13:18 PM	H2 MFC set to  0.000000
5/21/2012	12:13:18 PM	BCl3 MFC set to  0.000000
5/21/2012	12:13:18 PM	PH3 MFC set to  0.000000
5/21/2012	12:13:18 PM	SiCl4 MFC set to  0.000000
5/21/2012	12:13:18 PM	Bypass solenoid MFC set to  0.000000
5/21/2012	12:13:18 PM	Tube furnace set to 0
5/21/2012	12:13:19 PM	Run finished at 12:13 PM
5/21/2012	12:13:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/21/2012	12:14:30 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/21/2012	12:14:31 PM	Recipe started at 12:14 PM
5/21/2012	12:14:31 PM	Helium valve closed
5/21/2012	12:14:31 PM	H2 valve closed
5/21/2012	12:14:31 PM	BCl3 valve closed
5/21/2012	12:14:31 PM	PH3 valve closed
5/21/2012	12:14:31 PM	SiCl4 pre valve closed
5/21/2012	12:14:31 PM	SiCl4 post valve closed
5/21/2012	12:14:31 PM	Main Vac valve closed
5/21/2012	12:14:31 PM	Bubbler valve closed
5/21/2012	12:14:31 PM	Bypass valve opened
5/21/2012	12:14:31 PM	Helium MFC set to  0.000000
5/21/2012	12:14:31 PM	H2 MFC set to  0.000000
5/21/2012	12:14:31 PM	BCl3 MFC set to  0.000000
5/21/2012	12:14:31 PM	PH3 MFC set to  0.000000
5/21/2012	12:14:31 PM	SiCl4 MFC set to  0.000000
5/21/2012	12:14:31 PM	Bypass solenoid MFC set to  0.000000
5/21/2012	12:14:31 PM	Tube furnace set to 0
5/21/2012	12:15:37 PM	Helium valve closed
5/21/2012	12:15:37 PM	H2 valve closed
5/21/2012	12:15:37 PM	BCl3 valve closed
5/21/2012	12:15:37 PM	PH3 valve closed
5/21/2012	12:15:37 PM	SiCl4 pre valve closed
5/21/2012	12:15:37 PM	SiCl4 post valve closed
5/21/2012	12:15:37 PM	Main Vac valve closed
5/21/2012	12:15:37 PM	Bubbler valve closed
5/21/2012	12:15:37 PM	Bypass valve opened
5/21/2012	12:15:37 PM	Helium MFC set to  0.000000
5/21/2012	12:15:37 PM	H2 MFC set to  0.000000
5/21/2012	12:15:37 PM	BCl3 MFC set to  0.000000
5/21/2012	12:15:37 PM	PH3 MFC set to  0.000000
5/21/2012	12:15:37 PM	SiCl4 MFC set to  0.000000
5/21/2012	12:15:37 PM	Bypass solenoid MFC set to  0.000000
5/21/2012	12:15:37 PM	Tube furnace set to 0
5/21/2012	12:16:37 PM	Helium valve closed
5/21/2012	12:16:37 PM	H2 valve closed
5/21/2012	12:16:37 PM	BCl3 valve closed
5/21/2012	12:16:37 PM	PH3 valve closed
5/21/2012	12:16:37 PM	SiCl4 pre valve closed
5/21/2012	12:16:37 PM	SiCl4 post valve closed
5/21/2012	12:16:37 PM	Bypass valve closed
5/21/2012	12:16:37 PM	Bubbler valve closed
5/21/2012	12:16:37 PM	Main Vac valve opened
5/21/2012	12:16:37 PM	Helium MFC set to  0.000000
5/21/2012	12:16:37 PM	H2 MFC set to  0.000000
5/21/2012	12:16:37 PM	BCl3 MFC set to  0.000000
5/21/2012	12:16:37 PM	PH3 MFC set to  0.000000
5/21/2012	12:16:37 PM	SiCl4 MFC set to  0.000000
5/21/2012	12:16:37 PM	Bypass solenoid MFC set to  0.000000
5/21/2012	12:16:37 PM	Tube furnace set to 0
5/21/2012	12:16:38 PM	Run finished at 12:16 PM
5/21/2012	12:16:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
